Micro/Nano Scale

Latest Innovations

Metal-Assisted Etching For Improved Porous Semiconductors

 

The invention is a novel method for manufacturing porous semiconductors, including silicon (Si), gallium nitride (GaN) and silicon carbide (SiC). The method...

Microscale Liquid Conductivity Sensors

 

Conductivity of a liquid solution provides valuable information about the solution, but commercially available conductivity probes are costly and have diameters...

Highly Reflective Interface for Distributed Bragg Reflectors (DBRs)

 

Distributed Bragg Reflectors (DBRs) are a fundamental component of optical devices requiring an optical gain, such as various types of semiconductor lasers....

Ultrathin Dielectric Oxide Films On Silicon

 

The technology is a chemical method for preparing ultrathin oxide films on silicon with low leakage currents and high capacitance, optimizing the electrical...

Improved Ion-Implanted pn Junctions in Semiconductors

 

The invention improves the process of ion implantation and annealing, which is used to introduce dopants into a semiconductor to make pn junctions. The...

Nanotip Engineering Suite

 

Developed by the University of Illinois at Urbana-Champaign, this suite of six technologies enhances multiple facets of nanolithography and scanning probe...

High Strength Low-k Insulators

 

A polymer comprises at least two types of monomer units selected from: (1) diethynyl benzene units, (2) triethynyl benzene units, and (3) ester units. After curing...

Sub-10 nm fabrication: molecular templating, electron-beam sculpting and crystallization of metallic nanowires

 

This technology provides a technique for fabricating metallic structures with dimensions considerably smaller than 10 nm and the use of a focused electron beam to...

Parallel-Kinematics Flexure Stage (PKFS)

 

This parallel-kinematics flexure stage (PKFS) generates a motion range larger than, or at least comparable to, current commercial designs while simultaneously...

Method For Fabricating Complex Micro and Nanoscale Electronic Structures by Sub Pixel-voting Lithography and Devices Made by Same

 

This invention provides processing steps, methods and materials strategies for making patterns of structures for electronic, optical and optoelectronic devices....

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