Micro/Nano Scale

Latest Innovations

Metal Complexes for Depositing Metal-Containing Thin Films

 

This technology is a family of metal complexes that can be used for depositing metal compounds.

Method for Fabricating Dual Damascene Profiles

 

This invention provides processing steps, methods and materials strategies for making patterns of structures for integrated electronic devices and systems....

Quantum Nanopore Structure

 

The invention provides a quantum well active region for an optoelectronic device. The quantum well active region includes barrier layers of high bandgap material....

Curved Coupled Waveguide Array

 

A semiconductor laser that includes an active region, claddings and electrical contacts to stimulate emissions from the active region, where a coupled waveguide...

In-Situ Simultaneous Actuation and Displacement Sensing with Electrostatic Actuators Using Amplitude and/or Phase Modulation

 

An electrostatic drive includes a first electrode and a second electrode responsive to a drive signal. The drive signal includes an actuation signal constituent...

Direct Nanoscale Patterning of Metals Using Polymer Electrolytes

 

Electrochemical fabrication platforms for making structures, arrays of structures and functional devices having selected nanosized and/or microsized physical...

Material Assisted Laser Ablation

 

This invention provides photoablation--based processing techniques and materials strategies for making, assembling and integrating patterns of materials for the...

Femto-Joule Atomic Scale Reversible Switch

 

A device that incorporates teachings of the present disclosure may include, for example, a memory array having a first array of nanotubes, a second array of...

High Precision Silicon-on-Insulator (SOI) MEMS Parallel Kinematics Stages

 

MEMS stages comprising a plurality of comb drive actuators provide micro and up to nano-positioning capability. Flexure hinges and folded springs that operably...

Patterning Methods for Stretchable Structures

 

Described herein are processing techniques for fabrication of stretchable and/or flexible electronic devices using laser ablation patterning methods. The laser...

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