Micro/Nano Scale

Latest Innovations

Mirror Arrays for Maskless Photolithography and Image Display

 

This invention is a class of micromirrors with high reflectivity dielectric layer coated on top of micromirror that can be tuned to allow transparency or...

Highly Controllable ICP Low Rate Etching of Gallium-Based III-V Semiconductor Materials

 

A method of plasma etching Ga-based compound semiconductors includes providing a process chamber and a source electrode adjacent to the process chamber. The...

A High Speed, High-Precision Micro and Nano-Scale Cutting Machine

 

Photolithography, a method for manufacturing grooves into surfaces of silicon primarily for the design and manufacture of electronics, has certain limitations when...

Hybrid Semiconductor 3D Nanoscale Patterning Method Using Superionic Solid State Stamping (S4) and Metal Assisted Etching (MacEtch)

 

Various high aspect ratio semiconductor 3D nanostructures have begun to have profound effect on the design and performances of many types of devices, including...

Self-Aligning Mechanism for Uniaxial Tests at Micro-Nano Scale and Method for in situ Mechano-Electrical Measurements of Micro-Nano Scale Specimens

 

Current methods of performing tensile tests on micro-nano scale material samples have an inherent flaw, namely that true uniaxial loads are difficult to achieve....

Extreme Miniaturized 3D Spiral On-Chip Inductors, Transformers, and Transmission Lines

 

Inductors

Researchers at the University of Illinois have developed a novel design of on-chip inductors using multiple turn microtubes based on stain-...

On-Chip Terahertz Cozxial Transmission Line Based on Local Stress controlled Self-Rolled-up SiNx Nanomembrane Technology

 

Inductors

Researchers at the University of Illinois have developed a novel design of on-chip inductors using multiple turn microtubes based on stain-...

Self-Rolled-UP Tube Base Vertical Coupler for 3D Monolithic Photonic Integration

 

Researchers have developed a new self-rolled-up tube based vertical photonic coupler. The technology will open up new design perspectives for semiconductor...

Cobalt Precursors For Formation of Cobalt or Cobalt-Containing Material

 

Chemical vapor deposition (CVD) of cobalt requires a cobalt precursor that can be easily vaporized, leaving high-purity cobalt on a surface while causing no...

Multiplexed Sensor Arrays for Micro/Nanofluidic Networks

 

The ability to increase the functionality and complexity of micro/nanofluidic devices is currently limited by the capacity to accurately detect the position of...

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