Micro/Nano Scale

Latest Innovations

Non-Reciprocal Communication Device

Professor Gaurav Bahl has developed a novel way to enable non-reciprocal communication with optical, acoustic and electromagnetic media. This innovation can be very small...

MacEtch for Ge and β-Ga2O3

This metal-assisted chemical etching (MacEtch) technology can be used to fabricate structure and texture on Ge and β-Ga2O3Et. The optoelectronic...

Polarization Dependent Damage-Free Laser-Assisted Plasma Etching

Drs. David Ruzic and Jason Peck from the University of Illinois at Urbana-Champaign have developed a new plasma etching process assisted by a polarized pulsed laser. This...

Area Selective CVD metal deposition for Molybdenum, Iron, and Ruthenium

Dr. John Abelson has developed an area selective CVD metal deposition technology.  This technology can selectively deposit thin metal layer on a surface. By using...

Nanophotonic non-reciprocal circuit

Dr. Gaurav Bahl from the University of Illinois at Urbana-Champaign has developed a nanophotonic non-reciprocal circuit. The invention allows light to travel only in one...

Flat panel display with increased clarity

Dr. Paul Braun from the University of Illinois at Urbana-Champaign has developed a new design architecture for backlit LCDs....

Magnetically Responsive Micro-structured Surfaces

Dr. Seok Kim from the University of Illinois at Urbana-Champaign has developed a versatile surface material that will serve as a general-purpose platform for fluid and...

Volumetric Optical Integrated Circuit Elements (V.O.I.C.E.)

This technology enables the fabrication of multiple plans of interconnected passive photonic devices with the volume of a silicon wafer. The fabrication technique uses...

Low Quantum Defect Fiber Lasers via Yb-Doped  Multicomponent Fluorosilicate Optical Fiber

Dr. Dragic from the University of IL has developed a low-quantum defect fiber-based laser. This invention assists with the management of...

Frequency Independent Framework for Synthesis of Programmable Non-reciprocal Network

Dr. Songbin Gong and his group from the University of Illinois have developed a framework for synthesizing frequency-independent multi-port nonreciprocal networks. The...

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