MEMS Devices

Latest Innovations

Single-chip Neural Probe with High Temporal Resolution

Dr. Yurii Vlasov from the University of Illinois has developed a single-chip neural nanodialysis probe that can sample in vivo brain chemicals, store them, and then...

5G Acoustic Filters

Dr. Songbin Gong from the University of Illinois has developed a suite of technologies for the design strategy and method of fabricating acoustic front-end filters at various frequencies,...

Dr. Songbin Gong from the University of Illinois has developed a suite of technologies for the design strategy and method of fabricating acoustic front-end filters at various frequencies, including frequencies > 6 GHz. These acoustic front-end filters demonstrate high electromechanical coupling, high fractional bandwidths, as well as high quality factors. This is achieved through a combination of materials selection, resonator design, and filter design.

This technology:

 

  • Increases the frequency range and the fractional bandwidth of acoustic filters
  • Enables the future generations of wireless communication
  • Allows access to frequency bands above 6 GHz and provides the high FBW required for 5G communications

Ultrasoft Slip-mediated Bending in Few-layer Graphene

This technology leverages the bending stiffness and super lubricity of few-layer materials to create ultra-flexible 2D materials with tunable electronic properties....

A Piezoelectric Micromachined Ultrasonic Transducer Using Thin-Film Lithium Niobate

Professor Songbin Gong and researchers from the Department of Electrical and Computer Engineering have developed a design strategy and method for fabricating efficient...

Ultra-flexible 2D Heterostructures for MEMS and Optoelectronic Applications

Researchers at the University of Illinois have developed ultra-flexible heterostructures made from 2D layers of van der Waals bonded materials. The heterostructures retain...

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