MEMS Devices

Latest Innovations

Micro-Mirror with Elastomeric Universal Joint Fabricated via Micro-Masonry

 

Dr. Seok Kim from the University of Illinois has developed a method to fabricate a silicon-based MEMS mirror and its elastomeric universal joint. This method,...

Microcantilever Heater-Thermometer with Integrated Temperature Compensated Strain Sensor

 

Thermal sensitivity in piezoresistive sensors used in silicon microcantilevers makes them susceptible to unwanted signals such as temperature drift. In addition,...

Terahertz Antenna for High Data Rate Communication

Dr. Xiuling Li from the University of Illinois at Urbana-Champaign has invented a helical antenna using her self-rolled-up membrane technology that is capable of terahertz...

An SH0 Lithium Niobate Dispersive Delay Line for Chirp Compression

The power of EM wave will get attenuated as it travels through the air. Therefore, by the time it ends up getting picked up by the receiver, the power level usually is...

Microassembly of Heterogenous Materials for the Manufacture of MEMs Devices

Dr. Seok Kim from the University of Illinois at Urbana-Champaign has developed a method for assembling 3D architectures out of heterogeneous materials used to make MEMs...

Magnetically Responsive Micro-structured Surfaces

Dr. Seok Kim from the University of Illinois at Urbana-Champaign has developed a versatile surface material that will serve as a general-purpose platform for fluid and...

Non-Linear Elastomer Spring based MEMS Vibration Energy Harvester

Dr. Seok Kim from the University of IL has developed has developed a mems scale energy harvesting device that utilizes non-linear elastomer springs to convert energy....

Resonator with Elastomeric Beams and Stretchable Interconnects

Dr. Seok Kim from the University of Illinois has developed a spring-mass system with unique tunable mechanical properties that serves as a platform for potential...

Single-chip Neural Probe with High Temporal Resolution

Dr. Yurii Vlasov from the University of Illinois has developed a single-chip neural nanodialysis probe that can sample in vivo brain chemicals, store them, and then...

5G Acoustic Filters

Dr. Songbin Gong from the University of Illinois has developed a suite of technologies for the design strategy and method of fabricating acoustic front-end filters at various frequencies,...

Dr. Songbin Gong from the University of Illinois has developed a suite of technologies for the design strategy and method of fabricating acoustic front-end filters at various frequencies, including frequencies > 6 GHz. These acoustic front-end filters demonstrate high electromechanical coupling, high fractional bandwidths, as well as high quality factors. This is achieved through a combination of materials selection, resonator design, and filter design.

This technology:

 

  • Increases the frequency range and the fractional bandwidth of acoustic filters
  • Enables the future generations of wireless communication
  • Allows access to frequency bands above 6 GHz and provides the high FBW required for 5G communications

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