Micro-Mirror with Elastomeric Universal Joint Fabricated via Micro-Masonry


Dr. Seok Kim from the University of Illinois has developed a method to fabricate a silicon-based MEMS mirror and its elastomeric universal joint. This method, termed micro-masonry, can be extended to integrate elastomer and silicon components, thus enabling strong mechanical and electrical connections between two heterogeneous materials without causing the damage of elastomer. As a result, the fabricated device could exhibit 3D motion in a compact gimballess design.