Improved Method for Fabricating a S-RuM Inductor with High Q

This is a new method for fabricating a self-rolled-up membrane (S-RuM) membrane. The invention allows for the fabrication of high-quality-factor milliTesla- and Tesla-level inductors for high density circuit applications and allows for the precise tuning of the inductor performance by varying the space between subsequent turns (coils), which affects the thickness of the conducting layers within the inductor. Importantly, this method provides tunable three-dimensional inductors with a reduced footprint when compared with conventional planar inductors.