MEMS Devices

Latest Innovations

Fabrication of Microfluidic Systems and Components Using Light Initiated Polymerization

 

An innovative, cost-effective method for making and integrating fluidic microchannels. This method for ultra-rapid prototyping of microfluidic systems requiring...

High Precision Silicon-on-Insulator (SOI) MEMS Parallel Kinematics Stages

 

MEMS stages comprising a plurality of comb drive actuators provide micro and up to nano-positioning capability. Flexure hinges and folded springs that operably...

Micro-Mirror with Elastomeric Universal Joint Fabricated via Micro-Masonry

 

Dr. Seok Kim from the University of Illinois has developed a method to fabricate a silicon-based MEMS mirror and its elastomeric universal joint. This method,...

Microcantilever Heater-Thermometer with Integrated Temperature Compensated Strain Sensor

 

Thermal sensitivity in piezoresistive sensors used in silicon microcantilevers makes them susceptible to unwanted signals such as temperature drift. In addition,...

Gateable Nanofluidic Interconnects for Three-Dimensional Microfluidic Architectures: Intellipore

 

The Intellipore technology is a membrane system and method for creating complex, three-dimensional microfluidic devices with improved interconnect functionality....

Multi-functional Multi-layered Nano- & MicroFluidic Device

 

This technology describes a fabrication method for multi-channel, multi-layered microfluidic devices, with numerous functional characteristics capable of...

Multiplexed Sensor Arrays for Micro/Nanofluidic Networks

 

The ability to increase the functionality and complexity of micro/nanofluidic devices is currently limited by the capacity to accurately detect the position of...

Terahertz Antenna for High Data Rate Communication

Dr. Xiuling Li from the University of Illinois at Urbana-Champaign has invented a helical antenna using her self-rolled-up membrane technology that is capable of terahertz...

An SH0 Lithium Niobate Dispersive Delay Line for Chirp Compression

The power of EM wave will get attenuated as it travels through the air. Therefore, by the time it ends up getting picked up by the receiver, the power level usually is...

Magnetically Responsive Micro-structured Surfaces

Dr. Seok Kim from the University of Illinois at Urbana-Champaign has developed a versatile surface material that will serve as a general-purpose platform for fluid and...

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