MEMS Devices

Latest Innovations

Highly Efficient Microcooling/Heating Device

 

A compact active vapor compression cycle heat transfer device. The device of the invention includes a flexible diaphragm serving as the compressive member in a...

Fabrication of Microfluidic Systems and Components Using Light Initiated Polymerization

 

An innovative, cost-effective method for making and integrating fluidic microchannels. This method for ultra-rapid prototyping of microfluidic systems requiring...

Optical Control of MEMS Devices Utilizing Photovoltaic Diode

 

An electromagnetic energy, e.g., visible light, controlled low actuation voltage MEMS switch. Stimulation of photovoltaic diodes causes a switching that controls...

Gateable Nanofluidic Interconnects for Three-Dimensional Microfluidic Architectures: Intellipore

 

The Intellipore technology is a membrane system and method for creating complex, three-dimensional microfluidic devices with improved interconnect functionality....

Parallel-Kinematics Flexure Stage (PKFS)

 

This parallel-kinematics flexure stage (PKFS) generates a motion range larger than, or at least comparable to, current commercial designs while simultaneously...

Multi-functional Multi-layered Nano- & MicroFluidic Device

 

This technology describes a fabrication method for multi-channel, multi-layered microfluidic devices, with numerous functional characteristics capable of...

Microcantilever Heater-Thermometer with Integrated Temperature Compensated Strain Sensor

 

Thermal sensitivity in piezoresistive sensors used in silicon microcantilevers makes them susceptible to unwanted signals such as temperature drift. In addition,...

In-Situ Simultaneous Actuation and Displacement Sensing with Electrostatic Actuators Using Amplitude and/or Phase Modulation

 

An electrostatic drive includes a first electrode and a second electrode responsive to a drive signal. The drive signal includes an actuation signal constituent...

Broadband, Electrically-Small Antenna

 

The utilization of small antennas for mobile devices and for low frequency (long wavelength) applications is desired. Further, efficient use of transmission power...

High Precision Silicon-on-Insulator (SOI) MEMS Parallel Kinematics Stages

 

MEMS stages comprising a plurality of comb drive actuators provide micro and up to nano-positioning capability. Flexure hinges and folded springs that operably...

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