MEMS Devices

Latest Innovations

Highly Efficient Microcooling/Heating Device

 

A compact active vapor compression cycle heat transfer device. The device of the invention includes a flexible diaphragm serving as the compressive member in a...

Fabrication of Microfluidic Systems and Components Using Light Initiated Polymerization

 

An innovative, cost-effective method for making and integrating fluidic microchannels. This method for ultra-rapid prototyping of microfluidic systems requiring...

Optical Control of MEMS Devices Utilizing Photovoltaic Diode

 

An electromagnetic energy, e.g., visible light, controlled low actuation voltage MEMS switch. Stimulation of photovoltaic diodes causes a switching that controls...

Gateable Nanofluidic Interconnects for Three-Dimensional Microfluidic Architectures: Intellipore

 

The Intellipore technology is a membrane system and method for creating complex, three-dimensional microfluidic devices with improved interconnect functionality...

Novel Device for Tensile Testing of Sub-Micron Scale Freestanding Thin Films

 

This technology is a new experimental method and device for the on-chip, uni-axial tensile testing of freestanding thin films, with virtually no restriction on...

Balanced Cantilever RF MEM Switch

 

A high life cycle and low voltage MEMS device. Separate support posts are disposed to prevent a suspended switch pad from touching the actuation pad while...

Signal Routing in Balanced Cantilever RF MEM Switch

 

A high life cycle MEMS device. The inventors have recognized that the deflection beam or deflection beams of an MEMS shunt switch are a failure point in need of...

Parallel-Kinematics Flexure Stage (PKFS)

 

This parallel-kinematics flexure stage (PKFS) generates a motion range larger than, or at least comparable to, current commercial designs while simultaneously...

Multi-functional Multi-layered Nano- & MicroFluidic Device

 

This technology describes a fabrication method for multi-channel, multi-layered microfluidic devices, with numerous functional characteristics capable of...

Multiplexed Sensor Arrays for Micro/Nanofluidic Networks

 

The ability to increase the functionality and complexity of micro/nanofluidic devices is currently limited by the capacity to accurately detect the position of...

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