MEMS Devices

Latest Innovations

A MicroNano Fiber Testing Device

 

Electro-spinning is a method for mass production of long polymeric nanofibers in a continuous non-woven form. The large variability in fabrication conditions and...

Microcantilever Heater-Thermometer with Integrated Temperature Compensated Strain Sensor

 

Thermal sensitivity in piezoresistive sensors used in silicon microcantilevers makes them susceptible to unwanted signals such as temperature drift. In addition,...

In-Situ Simultaneous Actuation and Displacement Sensing with Electrostatic Actuators Using Amplitude and/or Phase Modulation

 

An electrostatic drive includes a first electrode and a second electrode responsive to a drive signal. The drive signal includes an actuation signal constituent...

Broadband, Electrically-Small Antenna

 

The utilization of small antennas for mobile devices and for low frequency (long wavelength) applications is desired. Further, efficient use of transmission power...

High Precision Silicon-on-Insulator (SOI) MEMS Parallel Kinematics Stages

 

MEMS stages comprising a plurality of comb drive actuators provide micro and up to nano-positioning capability. Flexure hinges and folded springs that operably...

Micro-Mirror with Elastomeric Universal Joint Fabricated via Micro-Masonry

 

Dr. Seok Kim from the University of Illinois has developed a method to fabricate a silicon-based MEMS mirror and its elastomeric universal joint. This method,...

Low Actuation Voltage Microelectromechanical (MEM) RF Devices

 

A method and apparatus for controlling the flow of signals by selectively switching signals to ground and allowing signals to pass through a signal line based a...

Terahertz Antenna for High Data Rate Communication

Dr. Xiuling Li from the University of Illinois at Urbana-Champaign has invented a helical antenna using her self-rolled-up membrane technology that is capable of terahertz...

Lunch Box Size Portable Gas Chromatograph Portfolio 

The University of Illinois at Urbana-Champaign is seeking partners to further develop this suite of small gas chromatographs. This portfolio of eight patented technologies...

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