MEMS Devices

Latest Innovations

Micro-Mirror with Elastomeric Universal Joint Fabricated via Micro-Masonry

 

Dr. Seok Kim from the University of Illinois has developed a method to fabricate a silicon-based MEMS mirror and its elastomeric universal joint. This method,...

Low Actuation Voltage Microelectromechanical (MEM) RF Devices

 

A method and apparatus for controlling the flow of signals by selectively switching signals to ground and allowing signals to pass through a signal line based a...

Multiplexed Sensor Arrays for Micro/Nanofluidic Networks

 

The ability to increase the functionality and complexity of micro/nanofluidic devices is currently limited by the capacity to accurately detect the position of...

Terahertz Antenna for High Data Rate Communication

Dr. Xiuling Li from the University of Illinois at Urbana-Champaign has invented a helical antenna using her self-rolled-up membrane technology that is capable of terahertz...

Lunch Box Size Portable Gas Chromatograph Portfolio 

The University of Illinois at Urbana-Champaign is seeking partners to further develop this suite of small gas chromatographs. This portfolio of eight patented technologies...

An SH0 Lithium Niobate Dispersive Delay Line for Chirp Compression

The power of EM wave will get attenuated as it travels through the air. Therefore, by the time it ends up getting picked up by the receiver, the power level usually is...

Microassembly of Heterogenous Materials for the Manufacture of MEMs Devices

Dr. Seok Kim from the University of Illinois at Urbana-Champaign has developed a method for assembling 3D architectures out of heterogeneous materials used to make MEMs...

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