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III-V Metal Assisted Chemical Etching to Produce High Aspect Ratio III-V Semiconductor Nanostructures 

III-V Metal Assisted Chemical Etching to Produce High Aspect Ratio III-V Semiconductor Nanostructures [1]

This technology is a new method for creating high aspect ratio III-V semiconductor nanostructures. Unlike currently used commercial technologies, this method does not damage the crystal lattice of the existing structure, thus eliminating defects that hinder the material’s transport and optical properties.

Xiuling
Li

Inventors:

US Pat #: 
8,951,430
Issue Date: 
2/10/2015
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Source URL: https://otm.illinois.edu/technologies/iii-v-metal-assisted-chemical-etching-produce-high-aspect-ratio-iii-v-semiconductor

Links
[1] https://otm.illinois.edu/technologies/iii-v-metal-assisted-chemical-etching-produce-high-aspect-ratio-iii-v-semiconductor