MEMS Devices

Latest Innovations

A Piezoelectric Micromachined Ultrasonic Transducer Using Thin-Film Lithium Niobate

Professor Songbin Gong and researchers from the Department of Electrical and Computer Engineering have developed a design strategy and method for fabricating efficient...

Ultra-flexible 2D Heterostructures for MEMS and Optoelectronic Applications

Researchers at the University of Illinois have developed ultra-flexible heterostructures made from 2D layers of van der Waals bonded materials. The heterostructures retain...