Temperature limits the sensitivity and resolution of every surface electrical potential measurement made by an AFM today. With existing AFM probes, temperature and current cannot be modulated, thus it is difficult to control temperature or to measure electrical potential at the tip. This device uses an integrated resistive heating element and temperature controls to combine temperature applications with voltage measurements to remove the uncertainty of temperature in surface electrical potential measurements.
Using an integrated resistive heating element, the device has the ability to reach 1000 C and can control the temperature of the AFM probe tip to measure the tip's electrical resistance. This device makes nanoscale surface electrical potential measurements that may be a function of temperature. As this technique modulates the temperature precisely, it removes the temperature uncertainty of surface electrical potential measurements. Using multiple probes on a single chip, the device also addresses the slow-throughput of Dip Pen Nanolithography
Applications:
Semiconductor and surface science as well as repair applications in photo-mask and flat panel displays.
Benefits:
The ability to calibrate and control AFM tip temperature within 1C at temperatures greater than 1000 C. Multiple AFM probes that can be manufactured in bulk and can be addressed individually.